Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon

• Type: Article in International Scientific Journal
• Date: 2020

Authors

Silveira, B (Author) Other; Belo, J (Author) FCUP; Pinto, R (Author) Other; Silva, J (Author) Other; Ferreira, T (Author) Other; Pires, A (Author) Other; Chu, V (Author) Other; Conde, J (Author) Other; Frazão, O (Author) Other; pereira, a. m. (Author) FCUP

Journal

Title: EPJ Web of Conferences

ISSN: 2101-6275

Publisher: EDP Sciences

Other information

Authenticus ID: P-00S-2VT

DOI: 10.1051/epjconf/202023305003

Abstract (EN): <jats:p>To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film with a magneto strictive coefficient of ¿ S ~ 55 p.p.m. The experimental configuration uses a laser and a position sensitive detector to measure the displacement, based on an optical lever configuration, and a piezoelectric stage to calibrate the system.</jats:p>

Language: English

Type (Professor's evaluation): Scientific