Tese de Mestrado Integrado em Engenharia Electrotécnica e de Computadores

Electrical characterization and interpretation of MEMS Microphones with spring suspended backplates

Student:	Ana Mafalda Monteiro Oliveira Cortez
Student No.:	200303235
Supervisors:	José Alberto Peixoto Machado da Silva

Status:	Concluído
Since:	21-JUL-2009

Start:	15-SET-2008
Defence:	21-JUL-2009

Thesis Title:	Electrical characterization and interpretation of MEMS Microphones with spring suspended backplates
Provisional Title:	Design, simulation, and electrical characterization of mechanically moving components (MEMS) in SOI

Name	Role
José Carlos dos Santos Alves	Presidente
José Machado Da Silva	Vogal