Tese de Mestrado em Engenharia e Ciência de Dados

Anomaly Detection on Multivariate Time-Series from Lithography Equipment using Machine Learning

Student:	João Gabriel Luís Patrício
Student No.:	202100812
Supervisors:	Ricardo Jorge Teixeira de Sousa
Co-supervisors:	Ana Rita Dias Nogueira

Status:	Concluído
Since:	13-OUT-2023

Start:	03-OUT-2022
Thesis Submission:	27-SET-2023
Defence:	22-SET-2023

Thesis Title:	Anomaly Detection on Multivariate Time-Series from Lithography Equipment using Machine Learning
Provisional Title:	Anomaly Detection on Multivariate Time Series from Lithography Equipment using Machine Learning