Abstract (EN):
We have investigated the structural properties of Si1-xGex nanocrystals formed in an amorphous SiO2. matrix by magnetron sputtering deposition The influence of deposition parameters on nanocrystal size, shape, arrangement and internal structure was examined by X-ray diffraction, Raman spectroscopy, grazing incidence small angle X-ray scattering, and high resolution transmission electron microscopy We found conditions for the formation of spherical Si1-xGex nanocrystals with average sizes between 3 and 13 nm. uniformly distributed in the matrix In addition we have shown the influence of deposition parameters oil average nanocrystal size and Ge content x.
Language:
English
Type (Professor's evaluation):
Scientific
No. of pages:
4