Fabrication of Microfluidic Channels by Femtosecond Laser Micromachining and Application in Optofluidics

• Tipo: Artigo em Livro de Atas de Conferência Internacional
• Data: 2017

Autores

Maia, JM (Autor) Outra; Amorim, VA (Autor) Outra; Alexandre, D (Autor) Outra; Marques, PVS (Autor) FCUP

Ata de Conferência Internacional

Título: PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON PHOTONICS, OPTICS AND LASER TECHNOLOGY (PHOTOPTICS)

Páginas: 106-113

5th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)

Porto, PORTUGAL, FEB 27-MAR 01, 2017

Indexação

ISI Web of Knowledge - 0 Citações

Scopus - 0 Citações

Outras Informações

ID Authenticus: P-00N-4QB

DOI: 10.5220/0006167401060113

Abstract (EN): Micromachining with femtosecond laser can be exploited to fabricate optical components and microfluidic channels in fused silica, due to internal modification of the glass properties that is induced by the laser beam. In this paper, we refer to the formation of microfluidic channels, where an optimization of the fabrication procedure was conducted by examining etch rate and surface roughness as a function of the irradiation conditions. Microfluidic channels with high and uniform aspect ratio and with smooth sidewalls were obtained, and such structures were successfully integrated with optical components. The obtained results set the foundations towards the development of new optofluidic devices.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 8