Fabrication of Microfluidic Channels by Femtosecond Laser Micromachining and Application in Optofluidics

• Type: Article in International Conference Proceedings Book
• Date: 2017

Authors

Maia, JM (Author) Other; Amorim, VA (Author) Other; Alexandre, D (Author) Other; Marques, PVS (Author) FCUP

Conference proceedings International

Title: PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON PHOTONICS, OPTICS AND LASER TECHNOLOGY (PHOTOPTICS)

Pages: 106-113

5th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)

Porto, PORTUGAL, FEB 27-MAR 01, 2017

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Other information

Authenticus ID: P-00N-4QB

DOI: 10.5220/0006167401060113

Abstract (EN): Micromachining with femtosecond laser can be exploited to fabricate optical components and microfluidic channels in fused silica, due to internal modification of the glass properties that is induced by the laser beam. In this paper, we refer to the formation of microfluidic channels, where an optimization of the fabrication procedure was conducted by examining etch rate and surface roughness as a function of the irradiation conditions. Microfluidic channels with high and uniform aspect ratio and with smooth sidewalls were obtained, and such structures were successfully integrated with optical components. The obtained results set the foundations towards the development of new optofluidic devices.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 8