Piezoresistive silicon thin film sensor array for biomedical applications

• Tipo: Artigo em Revista Científica Internacional
• Data: 2011

Autores

Alpuim, P (Autor) Outra; Correia, V (Autor) Outra; Marins, ES (Autor) Outra; Rocha, JG (Autor) Outra; Trindade, IG (Autor) Outra; Lanceros Mendez, S (Autor) Outra

Revista

Título: Thin Solid Films

Vol. 519

Páginas: 4574-4577

ISSN: 0040-6090

Editora: Elsevier

Indexação

ISI Web of Knowledge - 17 Citações

Scopus - 27 Citações

Outras Informações

ID Authenticus: P-002-RJF

DOI: 10.1016/j.tsf.2011.01.300

Abstract (EN): N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor -28. were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 degrees C. The piezoresistive response under cyclic quasi-static and dynamical (up to 100 Hz) load conditions is reported. Test structures, consisting of microresistors having lateral dimensions in the range from 50 to 100 mu m and thickness of 120 nm were defined in an array by reactive ion etching. Metallic pads, forming ohmic contacts to the sensing elements, were defined by a lift-off process. A readout circuit for the array consisting in a mutiplexer on each row and column of the matrix is proposed. The digital data will be processed, interpreted and stored internally by an ultra low-power micro controller, also responsible for the communication of two-way wireless data, e.g. from inside to outside the human body.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 4