Nanocomposite Ag:TiN thin films for dry biopotential electrodes

• Tipo: Artigo em Revista Científica Internacional
• Data: 2013

Autores

Paulo Pedrosa (Autor) FEUP; D. Machado (Autor) Outra; C. Lopes (Autor) Outra; E. Alves (Autor) Outra; N. P. Barradas (Autor) Outra; N. Martin (Autor) Outra; C. Fonseca (Autor) FEUP; F. Vaz (Autor) Outra

Revista

Título: Applied Surface Science

Vol. 285

Páginas: 40-48

ISSN: 0169-4332

Editora: Elsevier

Indexação

ISI Web of Knowledge - 36 Citações

ISI Web of Science

Scopus - 37 Citações

Classificação Científica

FOS: Ciências da engenharia e tecnologias > Engenharia dos materiais

CORDIS: Ciências Tecnológicas > Engenharia > Engenharia de materiais

Outras Informações

ID Authenticus: P-006-68G

DOI: 10.1016/j.apsusc.2013.07.154

Abstract (EN): Silver-added titanium nitride (Ag:TiN) thin films were deposited by DC reactive sputtering with Ag contents ranging from 0 to similar to 50 at.% on silicon and glass substrates, aiming at studying their potential application as bio-electrodes. The coatings were characterised regarding their composition, morphology and structure, and their influence on the variation of the electrical resistivity and thermal properties. The sputtered films' behaviour was consistently divided into three main zones, defined mainly by the amount of Ag incorporated and the corresponding changes in the structural and morphological features, which affected both the electrical and thermal response of the films. With increasing Ag concentration, the coatings evolve from a nitride/compound-like behaviour to a metallic-like one. Resistivity values suffer a strong decrease due to the increase of compactness of the coatings and the formation of highly conductive Ag phases, counterbalancing the grain size decrease effects promoted by the hindered growth of the crystalline TiN phases. In good agreement with the electrical resistivity evolution, a similar trend was found in the effusivity values, reflecting a significant degradation of the heat conduction mechanisms in the films as the silver content was increased.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 9