Micro and Nano Fabrication

Code:

F4022

Acronym:

F4022

Level:

400

Keywords
Classification	Keyword
OFICIAL	Physics

Instance: 2019/2020 - 1S

Active?	Yes
Responsible unit:	Department of Physics and Astronomy
Course/CS Responsible:	Master in Physics

Cycles of Study/Courses

Acronym	No. of Students	Study Plan	Curricular Years	Credits UCN	Credits ECTS	Contact hours	Total Time
M:F	4	Official Study Plan	1	-	3	34	81
MI:EF	17	study plan from 2017/18	4	-	3	34	81

Teaching language

English

Objectives

Objectives

To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.

To be able to plan and execute experiments

To be able to perform literature searches, including critical assessment; development of correct oral and written expression.

To be able to develop well defined mini-projects

Learning outcomes and competences

Main competences

To be able to apply correctly maths, science and engineering concepts

To be able to plan and execute experiments and to perform data analysis

To be able to develop teamwork skills

To be able to identify, and solve problems in physics and engineering

To be able to identiy processes and/or materials systems to achieve certain specifications

To be able to communicate efficiently

Working method

Presencial

Program

• General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.

• Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).

• Microlithography: production of masks for contact lithography and laser direct writing.

• Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).

• Characterization techniques: optical and profilometry.

• Wire bonding. Cutting and polishing of substrates and devices.

• Fabrication of a functional microdevice

Mandatory literature

Madou Marc J.; Fundamentals of microfabrication. ISBN: 0-8493-0826-7

Teaching methods and learning activities

The course teaching is based on a problem solving approach. Students, based on technical knowledge acquired by reading scientific papers and technical documents provided, plan the experiment, being supported by the teacher. The teachers also support the students in the realization of experiment and in the critical analysis of the results. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis. 

Evaluation Type

Distributed evaluation without final exam

Assessment Components

designation	Weight (%)
Participação presencial	10,00
Prova oral	45,00
Trabalho escrito	45,00
Total:	100,00

Amount of time allocated to each course unit

designation	Time (hours)
Estudo autónomo	47,00
Frequência das aulas	34,00
Total:	81,00

Eligibility for exams

Compulsory attendance of at least 2/3 of the lectures.

Calculation formula of final grade

The assessment consists of five distinct components: Continuous evaluation (10%), individual essay (45%), oral presentation of work and oral questions about micro and nanofabrication techniques (45%)

A minimum grade of 7.0/20 in each component valued above 30% is mandatory.

Classification improvement

Submission of a new written essay and oral presentation of its contents, that corresponds to 90% of the total grade.