Nanotechnologies, Micro and Nanofabrication

Code:

FIS4032

Acronym:

FIS4032

Level:

400

Keywords
Classification	Keyword
OFICIAL	Physics

Instance: 2024/2025 - 1S

Active?	Yes
Responsible unit:	Department of Physics and Astronomy
Course/CS Responsible:	Master in Engineering Physics

Cycles of Study/Courses

Acronym	No. of Students	Study Plan	Curricular Years	Credits UCN	Credits ECTS	Contact hours	Total Time
M:EF	43	Official Study Plan since 2021_M:EF	1	-	6	40	162
M:F	3	Official Study Plan	1	-	6	40	162
			2

Teaching language

Suitable for English-speaking students

Objectives

-Importance of nanotechnology;

-Relation between size reduction and modification of physical properties;

-Micro and nano fabrication techniques;

-Applications of nano-materials and devces;

-To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques;

-To be able to plan and execute experiments and projects;

-To be able to perform literature searches, including its critical assessment; development of oral and written expression;

-To be able to develo well defined mini-projects.

Main competences:

-To be able to apply correctly maths, science and engineering concepts;

-To be able to plan and execute experiments and to perform data analysis;

-To develop teamwork skills;

-To identify, and solve proble ms in physics and engineering;

-To identiy processes and/or materials systems to achieve certain specifications;

-To be able to communicate efficiently.

Learning outcomes and competences

Provide advanced training in key concepts of nanoscience and nanotechnology.

The program includes an introduction to the properties at the nanoscale, followed by the presentation of a set of micro/nanofabrication techniques and technologies, including deposition and lithography methodologies. With this part, the students are expected to familiarize themselves with the most importasnt methodologies in micro/nanofabrication. In the final part of the curricular unit, various principles of operation of devices, technologies and/or sensors will be presented.

This part is complemented by the execution of experiments proposed in the pratical sessions, reading articles or technical documents and the development of mini-projects. The students are stimulated to seek additional information to complement the given formation. At the end, the students should prepare a short report on the experimental work performed and give an oral presentation of a work.

Working method

Presencial

Program

TP

1. Introduction

2. Thin film Deposition techniques: PLD, IBD, Sputtering, Evaporation, CVD, ALD.

3. Micro/nanofabrication: Optical Lithography, E-beam and ion beam lithographies, X-ray lithography, Wet and dry etching methods.

4 Physical Properties I: MEMS, NEMS, devices and applications.

5 Physical Properties II: electrical and optical, quantum wells/wires/dots, confinement effects.

PL

1. General characteristics and specifications for cleanrooms

2. Production of thin films by thermal evaporation.

3. Microlithography: production of masks using laser direct writing.

4. Characterization techniques: optical and profilometry

5. Fabrication of a functional microdevice

Mandatory literature

Hari Singh Nalwa; Nanostructured materials and nanotechnology. ISBN: 0-12-513920-9
James D. Plummer, Peter B. Griffin; Integrated Circuit Fabrication Science and Technology. ISBN: 9781009303583
Sami Franssila; Introduction to microfabrication. ISBN: 978-0470-74983-8
Marc J. Madou; Fundamentals of microfabrication. ISBN: 0-8493-0826-7
Zheng Cui; Micro-nanofabrication. ISBN: 7-04-017663-7
P. Rai-Choudhury; Handbook of microlithography, micromachining, and microfabrication. ISBN: 0-8194-2378-5 Vol. 1

Complementary Bibliography

Lindsay S.M; An Introduction to Nanotechnology, Oxford, 2019
Sarangan A; Nanofabrication: Principles to Laboratory Practice, CRC Press, 2016

Teaching methods and learning activities

Theoretical-practical classes (TP)

Presentation of the curriculum using multimedia; specialized topics presented in lectures by invited. The basic principle of the classes will be based on a discussion between students and teachers.

Experimental classes:

The course teaching is based on a problem solving approach. Students, based on knowledge acquired by reading scientific papers and/or technical documents provided, plan the experiment supported by the teacher. The teachers also support students in the realization of experiment and in its critical analysis.

 

Evaluation Type

Distributed evaluation with final exam

Assessment Components

designation	Weight (%)
Exame	50,00
Prova oral	25,00
Trabalho escrito	25,00
Total:	100,00

Amount of time allocated to each course unit

designation	Time (hours)
Estudo autónomo	122,00
Frequência das aulas	40,00
Total:	162,00

Eligibility for exams

The students must attend at least 2/3 of the pratical lectures.

Calculation formula of final grade

Final Grade:0.5*Exam+0.25*Report+0.25*Oral presentation.

It is necessary to achieve a partial grade above 7/20 for the Exam component.

Classification improvement

The "Final exam" component of the final grade can be improved.

Observations

Jury:
João Ventura
Paulo Marques