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Low temperature hermetic laser-assisted glass frit encapsulation of soda-lime glass substrates

Title
Low temperature hermetic laser-assisted glass frit encapsulation of soda-lime glass substrates
Type
Article in International Scientific Journal
Year
2017-05-12
Authors
Seyedali Emami
(Author)
FEUP
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Jorge Martins
(Author)
FEUP
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Luísa Andrade
(Author)
FEUP
Adélio Mendes
(Author)
FEUP
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Journal
Vol. 96
Pages: 107-116
ISSN: 0143-8166
Publisher: Elsevier
Indexing
Publicação em ISI Web of Science ISI Web of Science
INSPEC
Other information
Authenticus ID: P-00M-SM6
Resumo (PT):
Abstract (EN): Room temperature and low temperature (120 degrees C) laser-assisted glass frit bonding of soda-lime glass substrates are accomplished in this work. The locally laser melted bonding showed hermeticity with helium leak rate of < 5 x 10(-8) atm cm(3) s(-1), maintaining its leak rate even after standard climatic cycle tests. Small size devices were bonded at room temperature while larger areas were sealed at the process temperature of 120 degrees C. The sealing parameters were optimized through response surface methodology that makes the process capable for further development regardless of device size.
Language: English
Type (Professor's evaluation): Scientific
No. of pages: 10
License type: Click to view license CC BY-NC-ND
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