Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

• Tipo: Artigo em Revista Científica Internacional
• Data: 2011

Autores

L.A. Rocha, E. Cretu and R.F. Wolffenbuttel (Autor) FEUP; Dias, RA (Autor) Outra; Cretu, E (Autor) Outra; Mol, L (Autor) Outra; José Machado da Silva (Autor) FEUP

Revista

A Revista está pendente de validação pelos Serviços Administrativos.

Título: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Vol. 17

Páginas: 429-436

ISSN: 0946-7076

Indexação

ISI Web of Knowledge - 26 Citações

Scopus - 34 Citações

Outras Informações

ID Authenticus: P-002-TEP

DOI: 10.1007/s00542-011-1252-8

Abstract (EN): This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 8