Non-equilibrium kinetics in N-2 discharges and post-discharges: a full picture by modelling and impact on the applications

• Tipo: Artigo em Revista Científica Internacional
• Data: 2011

Autores

Loureiro, J (Autor) Outra; Guerra, V (Autor) Outra; P. A . Sá (Autor) FEUP; Carlos Daniel Diogo Matias Pintassilgo (Autor) FEUP; Lino da Silva, ML (Autor) Outra

Revista

A Revista está pendente de validação pelos Serviços Administrativos.

Título: PLASMA SOURCES SCIENCE & TECHNOLOGY

Vol. 20

Páginas: 024007-024007

ISSN: 0963-0252

Indexação

ISI Web of Knowledge - 25 Citações

ISI Web of Science

Scopus - 27 Citações

Classificação Científica

FOS: Ciências exactas e naturais

Outras Informações

ID Authenticus: P-002-T1F

DOI: 10.1088/0963-0252/20/2/024007

Abstract (EN): The main concerns associated with the establishment of a self-consistent model for N-2 discharges and post-discharges at low pressures (typically p similar to 1 Torr), as well as in mixtures of this gas with O-2 and CH4 are analysed and discussed. The focus is given on the coupling of the various kinetics involved: electrons, vibrational molecules N-2(X (1)Sigma(+)(g), nu), dissociated atoms N(S-4), ionic species, and various atomic and molecular electronic states. The impact of N-2-O-2 and N-2-CH4 systems on the applications is briefly summarized by reviewing the essential kinetics. The difficulty in incorporating a self-consistent model for the surface kinetics is also discussed and a state-of-the-art approach for wall reactions is presented.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 12