Deposition of PZT thin film and determination of their optical properties

• Tipo: Artigo em Revista Científica Internacional
• Data: 1999

Autores

Czekaj, D (Autor) Outra; Gomes, MJM (Autor) Outra; Vasilevskiy, M (Autor) Outra; Pereira, M (Autor) Outra; Dos Santos, MP (Autor) Outra

Revista

Título: Journal of the European Ceramic Society

Vol. 19

Páginas: 1489-1492

ISSN: 0955-2219

Editora: Elsevier

Indexação

ISI Web of Knowledge - 11 Citações

Scopus - 11 Citações

Outras Informações

ID Authenticus: P-001-5YE

DOI: 10.1016/s0955-2219(98)00461-0

Abstract (EN): The RF magnetron sputtering technique was applied for the thin film deposition. Hot-pressed PZT ceramics doped mainly with Bi and Ge were used as a target. The PZT thin films were grown on different substrates (Si, stainless steel and glass) and the sputtering parameters were optimised to assure the composition transfer between the target and the thin film. The obtained samples were analysed first as made and then after post deposition annealing. Structure of the films was investigated by X-ray diffraction. Optical properties of the thin films were investigated by: (i) linear absorption method and (ii) Raman scattering. Results of the modelling of the optical spectra for the PZT films on glass substrates are also reported.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 4