Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

• Tipo: Artigo em Livro de Atas de Conferência Internacional
• Data: 2007

Autores

L. A. Rocha (Autor) FEUP; Lukas Mol (Autor) FEUP; Edmond Cretu (Autor) FEUP; Reinoud F. Wolffenbuttel (Autor) FEUP; José Machado da Silva (Autor) FEUP

Ata de Conferência Internacional

Título: 13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007)

Páginas: 171-175

13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007)

Póvoa de Varzim, Portugal, 18-20 June

Classificação Científica

FOS: Ciências da engenharia e tecnologias > Outras ciências da engenharia e tecnologias

CORDIS: Ciências Tecnológicas > Tecnologia > Micro-tecnologia > Micro-sistemas

Outras Informações

ID Authenticus: P-011-5PE

Abstract (EN): A test technique for capacitive MEMS accelerometers and electrostatic micro-actuators based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Preliminary measurements on fabricated devices confirm the validity of the proposed technique. Moreover, long-term pull-in measurements have indicated the suitability of the approach as in-system diagnostic tool.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Notas: http://paginas.fe.up.pt/~imstw07/downloads/IMSTW_GTW_07_program.pdf ISBN:978-972-99181-2-4

Nº de páginas: 5