Official Code: | 5552 |
Acronym: | PRODEF |
This curricular uni tis focused on the scientific and technological aspects related to micro and nanofabrication techniques in a bottom-down approach. Students will acquire knowledge about cleanrooms and associated support infrastructures, as well as the diverse micro/nanofabrication techniques, including photolithography, deposition and etching. A discussion about the chemcial/physical aspects underlying the diferente techniques; in the final part questions associated with the fabrication of functional devices for several applications (MEMS, integrated optics and microfluidics, for exemple) will be presented.