Stability of a Micromechanical Pull-In Voltage Reference

• Tipo: Artigo em Revista Científica Internacional
• Data: 2003

Autores

Luis A. Rocha (Autor) FEUP; E. Cretu (Autor) Outra; R. F. Wolffenbuttel (Autor) Outra

Revista

Título: IEEE Transactions on Instrumentation and Measurement

Vol. 52 Nº 2

Páginas: 457-460

ISSN: 0018-9456

Editora: IEEE

Outras Informações

DOI: 10.1109/TIM.2003.810007

Abstract (EN): The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100-μm length, 3-μm width, and 11-μm thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstrated an initial drift of -12 mV over 10 days and stabilized within the 500-μV measurement uncertainty. The measured temperature coefficient of -1 mV/K is in good agreement with the analysis and is due to the combined effect of thermal expansion and the temperature dependence of the Young's modulus in silicon.

Idioma: Inglês

Tipo (Avaliação Docente): Científica

Nº de páginas: 4