Piezoresistive silicon thin film sensor array for biomedical applications

• Type: Article in International Scientific Journal
• Date: 2011

Authors

Alpuim, P (Author) Other; Correia, V (Author) Other; Marins, ES (Author) Other; Rocha, JG (Author) Other; Trindade, IG (Author) Other; Lanceros Mendez, S (Author) Other

Journal

Title: Thin Solid Films

Vol. 519

Pages: 4574-4577

ISSN: 0040-6090

Publisher: Elsevier

Indexing

ISI Web of Knowledge - 17 Citations

Scopus - 27 Citations

Other information

Authenticus ID: P-002-RJF

DOI: 10.1016/j.tsf.2011.01.300

Abstract (EN): N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor -28. were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 degrees C. The piezoresistive response under cyclic quasi-static and dynamical (up to 100 Hz) load conditions is reported. Test structures, consisting of microresistors having lateral dimensions in the range from 50 to 100 mu m and thickness of 120 nm were defined in an array by reactive ion etching. Metallic pads, forming ohmic contacts to the sensing elements, were defined by a lift-off process. A readout circuit for the array consisting in a mutiplexer on each row and column of the matrix is proposed. The digital data will be processed, interpreted and stored internally by an ultra low-power micro controller, also responsible for the communication of two-way wireless data, e.g. from inside to outside the human body.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 4