Structural and Morphological Changes In Ag:TiN Nanocomposite Films promoted by in-vacuum annealing

• Type: Article in International Scientific Journal
• Date: 2013

Authors

D. Machado (Author) Other; Paulo Pedrosa (Author) FEUP; C. Fonseca (Author) FEUP; N. Martin (Author) Other; F. Vaz (Author) Other

Journal

Title: Journal of Nano Research

Vol. 25

Pages: 67-76

ISSN: 1662-5250

Publisher: Trans Tech Publications Ltd

Indexing

ISI Web of Knowledge - 7 Citations

ISI Web of Science

Scopus - 8 Citations

Scientific classification

FOS: Engineering and technology > Nano-technology

CORDIS: Technological sciences > Engineering > Materials engineering

Other information

Authenticus ID: P-006-K84

DOI: 10.4028/www.scientific.net/jnanor.25.67

Abstract (EN): Thin films composed of titanium nitride doped with silver were deposited by DC reactive sputtering, with Ag contents varying between 0 and 50 at.%. The as-deposited samples were subjected to vacuum annealing treatments, with a range of temperatures varying from 200 to 500 degrees C, in order to study the morphological and structural changes that may occur. The as-deposited samples showed three main zones of basic characteristics, which differ both in terms of morphology and structural features. By increasing the annealing temperature, the thermodynamic stability is accelerated, giving rise to (i) a uniform dispersion of silver particles at 200 degrees C; (ii) the start of segregation at 300 degrees C; (iii) at 400 degrees C the coalescence of the segregated Ag particles takes place and finally (iv) at 500 degrees C the formation of large Ag clusters is evident, particularly within the zone that comprises the samples with higher Ag content. In addition to corroborate the presence of free Ag in Ag:TiN thin films, the increasing annealing temperature promotes the improvement of the coating's crystallinity, as well as Ag grain growth.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 10