A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization

• Type: Article in International Scientific Journal
• Date: 2008

Authors

L. A. Rocha (Author) FEUP; L. Mol (Author) Other; E. Cretu (Author) Other; R. F. Wolffenbuttel (Author) Other; J. Machado da Silva (Author) FEUP

Journal

Title: VLSI Design

Vol. 2008 No. 283451

Pages: 1-7

ISSN: 1065-514X

Publisher: HINDAWI PUBLISHING CORPORATION

Indexing

Scopus - 13 Citations

INSPEC

COMPENDEX

Scientific classification

FOS: Engineering and technology > Other engineering and technologies

Other information

Authenticus ID: P-007-M4M

DOI: 10.1155/2008/283451

Abstract (EN): A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-in voltages and resonance frequency, is described. Using this combination of measurements, one can estimate process-induced variations in the device layout dimensions as well as deviations from nominal value in material properties, which can be used either for testing or device diagnostics purposes. Measurements performed on fabricated devices con¿rm that the 250 nm overetch observed on SEM images can be correctly estimated using the proposed technique.

Language: English

Type (Professor's evaluation): Scientific