In-situ plasma emission optical spectroscopy during pulsed laser ablation deposition of PZTN thin films

• Type: Article in International Scientific Journal
• Date: 2002

Authors

Jimenez, E (Author) Other; Gomes, MJM (Author) Other; Pereira, M (Author) Other; Costa, MF (Author) Other; Ferreira, MIC (Author) Other

Journal

Title: Vacuum

Vol. 64

Pages: 353-358

ISSN: 0042-207X

Publisher: Elsevier

Indexing

ISI Web of Knowledge - 3 Citations

Scopus - 3 Citations

Other information

Authenticus ID: P-000-S2N

DOI: 10.1016/s0042-207x(01)00328-1

Abstract (EN): Optical spectroscopy of the plasma emission produced by pulsed laser irradiation of a Nb-doped PZT (PZTN) target during film deposition is reported, including both spectral analysis of the emission species at different positions inside the plasma and time resolved measurements. The laser ablation system uses the second and third harmonic wavelengths of a 7 ns Nd: YAG laser. Several species present in plasma emission spectra were identified at two positions inside the expanding plasma under vacuum pressure (10(-7)mbar). The pulsed laser grown orientated PZTN films were characterized by X-ray diffraction (XRD).

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 6