Determination of residual stress in PZT films produced by laser ablation with X-ray diffraction and Raman spectroscopy

• Type: Article in International Scientific Journal
• Date: 2010

Authors

Rodrigues, SAS (Author) Other; Rolo, AG (Author) Other; Khodorov, A (Author) Other; Pereira, M (Author) Other; Gomes, MJM (Author) Other

Journal

Title: Journal of the European Ceramic Society

Vol. 30

Pages: 521-524

ISSN: 0955-2219

Publisher: Elsevier

Indexing

ISI Web of Knowledge - 16 Citations

Scopus - 20 Citations

Other information

Authenticus ID: P-003-BSG

DOI: 10.1016/j.jeurceramsoc.2009.09.003

Abstract (EN): The stresses in lead zirconate titanate (PZT) films, produced by pulsed laser deposition with different ratios Zr/Ti, 92/8, 65/35 and 55/45, was studied using Raman spectra and X-ray diffraction techniques. Based on lattice parameters and the elastic constants of PZT the films stresses were estimated from XRD measurements using the calculated d-spacing in the stressed and unstressed states. The results revealed the presence of compressive stress in PZT with composition 55/45 and tensile stress in the others. On the other hand, analysing the Raman phonon frequency in the A(1)(TO(3)) and E(LO(3)) vibration modes and taking into account the phonon frequency under zero stress and the stress under which the phonon frequency becomes zero the stress in these films was estimated. The residual stresses extracted from the A(1)(TO(3)) mode are consistent with those extracted from the E(LO(3)) mode and with those measured by X-ray diffraction technique.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 4