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Auto-calibrated capacitive MEMS accelerometer

Title

Auto-calibrated capacitive MEMS accelerometerExport publication in the APA format Export publication in the EXCEL format Export publication in the RIS format

Type

Article in International Conference Proceedings Book

Date

2008

Title

Auto-calibrated capacitive MEMS accelerometer

Type

Article in International Conference Proceedings Book

Year

2008

Authors

L. A. Rocha

(Author)

FEUP

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Lukas Mol

(Author)

FEUP

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Edmond Cretu

(Author)

FEUP

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Reinoud F. Wolffenbuttel

(Author)

FEUP

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José Machado da Silva

(Author)

FEUP

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Conference proceedings International

Title: 14th IEEE International Mixed-Signals, Sensors and Systems Test Workshop - IMSTW 2008 Search for Conference Proceedings Publications

Pages: 1-4

14th IEEE International Mixed-Signals, Sensors and Systems Test Workshop - IMSTW 2008

Vancouver, Canada, 18 a 20 de Junho de 2008

Scientific classification

FOS: Engineering and technology > Other engineering and technologies

Other information

Abstract (EN): An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 4

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