Linear calibration procedure for the phase-to-height relationship in phase measurement profilometry

• Type: Article in International Scientific Journal
• Date: 2007

Authors

Tavares, PJ (Author) Other; Mário Vaz (Author) FEUP

Journal

Title: Optics Communications

Vol. 274 No. 2

Pages: 307-314

ISSN: 0030-4018

Publisher: Elsevier

Indexing

ISI Web of Knowledge - 59 Citations

Scopus - 70 Citations

Other information

Authenticus ID: P-004-9CD

DOI: 10.1016/j.optcom.2007.02.038

Abstract (EN): Calibration of the relationship between height and phase is of uttermost importance to perform accurate 3D measurements in phase measurement profilometry. This work reports a different approach to this problem by first looking at the analytical expression for this relationship and determining the regime spanned by the fringe analysis method. The conclusions thus ascertained, amply justify confronting the analytical expression with a simple normalization procedure of the experimental data, with a remarkable matching between both results. In light of this, a linear calibration procedure with just one plane is proposed and verified experimentally.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 8