|OFICIAL||Electrical and Computer Engineering|
|Responsible unit:||Department of Electrical and Computer Engineering|
|Course/CS Responsible:||Doctoral Program in Electrical and Computer Engineering|
|Acronym||No. of Students||Study Plan||Curricular Years||Credits UCN||Credits ECTS||Contact hours||Total Time|
|PDEEC||1||Syllabus since 2015/16||1||-||7,5||70||202,5|
|Vítor Manuel Grade Tavares|
The objective of this course is to develop the background knowledge necessary to understand the state-of-the-art of semiconductor and Micro-Electro Mechanical Systems (MEMS) technologies, as well as the issues of integrating mechanical elements and electronics. A comprehensive, semester-long project is assigned, comprising the design of a sensor and the electronic front-end. This process requires the understanding of analogue design techniques as well as the basic design-flow used in the fabrication of MEMS devices, providing the integrated view of a MEMS-based sensor and analog front-end design. The basic concepts and circuits, for global noise reduction and interface between MEM-analogue and digital worlds, both at the circuit level and design methodologies, are also addressed for the understanding of the fundamental aspects associated with full system integration.
At the end of the course students should be able to:
1.Identify the MEMS structures and interpret its functionality.
2.Interpret a set of specifications for the MEMS sensor, and design a basic MEMS structure.
3.By means of the sensor specifications, specify the minimum performance required to the readout electronics by the MEMS sensor.
4.Decide the best circuit topologies based on the specifications set.
5.Search for new topologies and interpret them, based on acquired knowledge, in order to adapt the topologies to the required specifications.
6.Participate in teamwork, resulting from the proposed project activity in the course and that has multiple dependencies.
7.Design, simulate and conceive a CMOS circuit to the level of tap-out.
The course covers the following subjects:
1- IC and MEMS history – The integration perspective.
2- Introduction to MEMS: Main physical concepts: piezoresistivity, piezoelectricity, capacitive transduction.
3- Silicon mechanical properties.
4- MEMS fabrication: surface and bulk micromachining.
5- Design rules.
6- Devices basics: Inertial and pressure sensors.
7- Modeling of MEMS: Lumped modeling, mechanical domain modeling, electromechanical domain modeling.
8- Damping in MEMS: Squeeze film damping modeling.
1- MOS capacitor.
2- MOSFET operation - Strong and weak inversions (Modeling).
3- Higher order effects on MOSFET operation (Modeling).
4- MOSFET intrinsic caps and AC Model.
5- Models suitable for hand-calculations: Long-channel, lateral and vertical field mobility degradation – Short-Channel.
6- Spice Models.
7- Technology rules and layout.
8- Layout extraction and LVS - Inverter Example.
9- Basic Analog Cells - Introduction.
10- Voltage and current reference cells.
11- Current mirrors – Active loads
12- Two stage CMOS amplifier analysis.
13- Fully differential amplifiers.
14- CMFB & CMFF.
15- High-bandwidth amplifiers.
16- Low-voltage design.
17- Noise definitions.
18- Noise sources in analog and mixed signal circuits.
19- Input referred noise and noise factor.
20- Noise analysis in amplifiers.
21- Capacitive MEMS read-chain – Introduction.
22- Resolution and noise specs.
23- Analog vs discrete-time read-chain.
24- Continuous time, low-noise design: Charge Amplifier design and Chopper stabilization.
25- Switched Capacitor (SC) circuits and analysis.
26- Clock Feedthrough (CFT): noise, offset, nonlinearity.
27- Minimum design Specs: Noise (sampled), bandwidth, gain...
28- Noise reduction in SC circuits: Full differential design, Correlated Double-sampling (CDS) and delayed switching.
29- SC charge amplifier.
30- A/D and D/A concept and signal conditioning
31- Filter specifications and approximations for signal conditioning: Butterworth, Chebyshev, Elliptical.
32- SC Filters synthesis.
33- Gm-C Filters (synthesis).
34- Gm linear circuits.
35- A/D and D/A figures of merit.
36- Converter types with emphasis on Sigma-Delta.
This course combines lecture and project work to provide students with a practical, hands-on approach to microelectronics and micro-electro-mechanical systems (MEMS) technologies and systems conception. The lecture classes will take about half of the direct contact time, and will cover three main modules: Microelectronic principles, MEMS sensors and actuators and Signal conditioning and interfacing.
|Elaboração de projeto||80,00|
Passing all individual grading items (project, homework assignments and exams)
Final mark=0,3*Assignments + 0,3*Project + 0,2*FirstMidtermExam + 0,2*SecondMidtermExam