Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

• Type: Article in International Scientific Journal
• Date: 2009

Authors

Mayeh, M (Author) Other; Viegas, J (Author) Other; Srinivasan, P (Author) Other; Marques, P (Author) FCUP; Santos, JL (Author) FCUP; Johnson, EG (Author) Other; Farahi, F (Author) Other

Journal

Title: Journal of Sensors

Vol. 2009

Pages: 1-11

ISSN: 1687-725X

Publisher: Hindawi

Indexing

ISI Web of Knowledge

Scopus - 12 Citations

Other information

Authenticus ID: P-007-QSR

DOI: 10.1155/2009/470175

Abstract (EN): We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing. Copyright © 2009 M. Mayeh et al.

Language: English

Type (Professor's evaluation): Scientific