Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

• Type: Article in International Scientific Journal
• Date: 2011

Authors

L.A. Rocha, E. Cretu and R.F. Wolffenbuttel (Author) FEUP; Dias, RA (Author) Other; Cretu, E (Author) Other; Mol, L (Author) Other; José Machado da Silva (Author) FEUP

Journal

The Journal is awaiting validation by the Administrative Services.

Title: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Vol. 17

Pages: 429-436

ISSN: 0946-7076

Indexing

ISI Web of Knowledge - 26 Citations

Scopus - 34 Citations

Other information

Authenticus ID: P-002-TEP

DOI: 10.1007/s00542-011-1252-8

Abstract (EN): This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 8