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Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Title
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Type
Article in International Scientific Journal
Year
2011
Authors
L.A. Rocha, E. Cretu and R.F. Wolffenbuttel
(Author)
FEUP
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Dias, RA
(Author)
Other
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Cretu, E
(Author)
Other
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Mol, L
(Author)
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José Machado da Silva
(Author)
FEUP
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Journal
The Journal is awaiting validation by the Administrative Services.
Vol. 17
Pages: 429-436
ISSN: 0946-7076
Other information
Authenticus ID: P-002-TEP
Abstract (EN): This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated.
Language: English
Type (Professor's evaluation): Scientific
No. of pages: 8
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