Full characterization of pull-in in single-sided clamped beams

• Type: Article in International Scientific Journal
• Date: 2004

Authors

Luís A. Rocha (Author) FEUP; E. Cretu (Author) Other; R. F. Wolffenbuttel (Author) Other

Journal

Title: Sensors and Actuators, A: Physical

Vol. 110 No. 1-3

Pages: 301-309

ISSN: 0924-4247

Publisher: Elsevier

Other information

DOI: 10.1016/j.sna.2003.09.023

Abstract (EN): The most striking characteristic of the voltage-to-deflection curve of an electrostatically actuated beam is pull-in. The actual value of the pull-in voltage depends on: drive mode, temperature dependence and dielectric charging related drift. These aspects have been analysed using structures designed for a 9 V nominal pull-in voltage and fabricated in a commercially available epipoly process. Single-sided clamped beams have been used to avoid any influence of residual stress in the beam on pull-in. Typical results are: less than 5% variation of the pull-in voltage over a wafer, 0.17-1.9 V hysteresis depending on drive mode, a - 1 mV/K TC and - 12 mV drift during the first 2 weeks of operation. (C) 2003 Elsevier B.V. All rights reserved.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 9