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[Ir(u-Sc(Ch3)3)(Co)2]2: Um Novo Precursor de Irídio Para a Produção de Filmes por OMCVD Sobre Substratos de Grafite
Title
[Ir(u-Sc(Ch3)3)(Co)2]2: Um Novo Precursor de Irídio Para a Produção de Filmes por OMCVD Sobre Substratos de Grafite
Type
Article in International Conference Proceedings Book
Year
2000
Authors
H. Gomes
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Joaquim Luís Faria
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FEUP
José Luis Figueiredo
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FEUP
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R. Feurer
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Ph. Kalck
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Ph. Serp
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Conference proceedings International
Pages: 59-62
XIV Encontro Luso-Galego de Quimica
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Resumo (PT):
Abstract (EN):
A new one step synthesis of a volatile iridium OMCVD precursor with 60 % yield is described. Using the precursor [Ir(-SC(CH3)3)(CO)2]2 (see Figure), it is possible to obtain iridium of high purity. TGA/DTA analyses indicate that the precursor melts at 128 °C and starts to decompose at 160 °C. SEM analysis reveals that films deposited above 300 °C have a lamellar morphology while nodular morphology was obtained below 250 °C.
Language:
English
Type (Professor's evaluation):
Scientific
No. of pages:
4
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