A macro-micro motion servopneumatic device

• Type: Article in International Scientific Journal
• Date: 2012

Authors

João Pedro Falcão Carneiro (Author) FEUP; F. Gomes de Almeida (Author) FEUP

Journal

Title: Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering

Vol. 226 No. 6

Pages: 775-786

ISSN: 0959-6518

Publisher: SAGE

Indexing

ISI Web of Knowledge - 10 Citations

ISI Web of Science

Scopus - 14 Citations

INSPEC

Scientific classification

FOS: Engineering and technology > Mechanical engineering

Other information

Authenticus ID: P-002-872

DOI: 10.1177/0959651812439261

Abstract (EN): Micro motion tasks can be found in a wide set of applications, ranging from the assembly of small parts in the semiconductor industry to assisted surgery in medicine. Conventional actuation systems for these types of task are based on the existence of electromagnetic fields (servomotors) or on the existence of some kind of material shape alteration (piezoelectric actuators). Driven by the intrinsic advantages presented by pneumatic systems, such as low cost, the absence of heat or magnetic field generation and a wide range of operation, this article presents a different approach, based on the use of commonly available industrial servopneumatic components. Experimental results show that it is possible to correctly follow 5 mu m step references within a 280 mm stroke, without any controller retuning and with mass load changes from 2.69 to 13.1 kg.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 12