Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

• Type: Article in International Conference Proceedings Book
• Date: 2007

Authors

L. A. Rocha (Author) FEUP; Lukas Mol (Author) FEUP; Edmond Cretu (Author) FEUP; Reinoud F. Wolffenbuttel (Author) FEUP; José Machado da Silva (Author) FEUP

Conference proceedings International

Title: 13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007)

Pages: 171-175

13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007)

Póvoa de Varzim, Portugal, 18-20 June

Scientific classification

FOS: Engineering and technology > Other engineering and technologies

CORDIS: Technological sciences > Technology > Micro-technology > Microsystems

Other information

Authenticus ID: P-011-5PE

Abstract (EN): A test technique for capacitive MEMS accelerometers and electrostatic micro-actuators based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Preliminary measurements on fabricated devices confirm the validity of the proposed technique. Moreover, long-term pull-in measurements have indicated the suitability of the approach as in-system diagnostic tool.

Language: English

Type (Professor's evaluation): Scientific

Notes: http://paginas.fe.up.pt/~imstw07/downloads/IMSTW_GTW_07_program.pdf ISBN:978-972-99181-2-4

No. of pages: 5