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Measuring and interpreting the mechanicalthermal noise spectrum in a MEMS

Title
Measuring and interpreting the mechanicalthermal noise spectrum in a MEMS
Type
Article in International Scientific Journal
Year
2005
Authors
L.A. Rocha, E. Cretu and R.F. Wolffenbuttel
(Author)
FEUP
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Journal
Vol. 15
Pages: S30-S38
ISSN: 0960-1317
Other information
Language: Portuguese
Type (Professor's evaluation): Scientific
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