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Characterisation of titanium passivation films by in situ ac impedance measurements and XPS analysis

Title
Characterisation of titanium passivation films by in situ ac impedance measurements and XPS analysis
Type
Article in International Scientific Journal
Year
1994
Authors
C. Fonseca
(Author)
Other
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Boudin, S
(Author)
Other
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da Cunha Belo, M
(Author)
Other
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Journal
The Journal is awaiting validation by the Administrative Services.
Vol. 379
Pages: 173-180
ISSN: 0022-0728
Indexing
Other information
Authenticus ID: P-00P-WGT
Abstract (EN): Capacitance-potential measurements by ac impedance methods have shown that for polarisations of 0.5 to 0.7 V from the flat band potential, titanium passivation films formed between 0.2 and 2 V (thicknesses ranging from 15 to 100 Å) display Mott-Schottky behaviour, with frequency dependent slopes. This study develops a theoretical approach which takes account of the frequency dispersion and allows the determination of flat band potentials, donor densities, and Helmholtz capacitances for the films. The Mott-Schottky behaviour was attributed to the presence of Ti3+ as the doping element. Experimental evidence for this was obtained from XPS spectra. For films formed above 2 V the linear Mott-Schottky region was difficult to define, and capacitance vs. potential plots resembled the behaviour of amorphous semiconductors. © 1994.
Language: English
Type (Professor's evaluation): Scientific
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