Abstract (EN):
A large volume post-discharge reactor placed downstream from a flowing N-2-O-2 microwave discharge is modelled using a three-dimensional hydrodynamic model. The density distributions of the most populated active species present in the reactor-O(P-3), O-2(a(1) Delta(g)), O-2(b(1) Sigma(+)(g)), NO(X (II)-I-2), NO(A (2)Sigma(+)), NO(B 2II), NO2(X), O-3, O-2(X (3)Sigma(-)(g)) and N(S-4)-are calculated and the main source and loss processes for each species are identified for two discharge conditions: (i) p = 2 Torr, f = 2450 MHz, and (ii) p = 8 Torr, f = 915 MHz; in the case of a N-2-2% O-2 mixture composition and gas flow rate of 2 x 10(3) sccm. The modification of the species relative densities by changing the oxygen percentage in the initial gas mixture composition, in the 0.2%-5% range, are presented. The possible tuning of the species concentrations in the reactor by changing the size of the connecting afterglow tube between the active discharge and the large post-discharge reactor is investigated as well.
Language:
English
Type (Professor's evaluation):
Scientific
No. of pages:
12