Abstract (EN):
More and more, tests designed to accelerate product certification cycles and rapidly provide quality and reliability assurances to increasingly demanding clients are performed by generic equipments, which do not follow the SECS/GEM communication standard. Existing integration platforms are prepared to handle semiconductor industry specific equipments, but neglect to provide support for non SECS/GEM compliant equipments.
The proposed solution allows for the integration of these equipments in existing platforms, by means of developing communication driver wrappers, thus emulating the SECS/GEM standard, and therefore allowing for a complete and centralized control of all production site equipments. Graphical user interface modules were also considered, allowing for a flexible and intuitive control of the equipments, and providing an overall view of specified sets of equipments. In order to further increase the degree of flexibility of the application, the graphical user interface can be run from any point inside the production site network, allowing for a more distributed and cluster-specific equipment management. The drivers were, on a first phase, developed for single equipments, in order to verify the feasibility and practicability of such solution. Integration tests were successfully conducted on different equipments, and encouraging and promising results were obtained. The generalization of this concept can lead to the development of a framework able to automatically generate equipment driver wrappers, once provided with the equipment communication protocol, supported features and a mapping between equipment protocol and corresponding SECS/GEM functions.
Language:
English
Type (Professor's evaluation):
Scientific