Optical fiber interferometer for measuring the d(33) coefficient of piezoelectric thin films with compensation of substrate bending

• Type: Article in International Scientific Journal
• Date: 2002

Authors

Fernandes, JR (Author) Other; de Sa, FA (Author) Other; Santos, JL (Author) FCUP; Joanni, E (Author) Other

Journal

Title: Review of Scientific Instruments

Vol. 73

Pages: 2073-2078

ISSN: 0034-6748

Publisher: American Institute of Physics

Indexing

ISI Web of Knowledge - 12 Citations

Scopus - 17 Citations

Scientific classification

FOS: Engineering and technology > Other engineering and technologies

Other information

Authenticus ID: P-000-PM3

DOI: 10.1063/1.1463713

Abstract (EN): An optical fiber interferometer for measuring the d(33) coefficient of piezoelectric samples is described. Its configuration is based on the Mach-Zehnder interferometer, and a double incidence on the thin-film samples successfully suppresses the undesirable bending effect of the substrate. Detection of the small displacement is based on an active homodyne scheme. Results are reported for a bulk piezoelectric transducer (PZT) sample and a PZT thin-film incorporated in a microactuator. (C) 2002 American Institute of Physics.

Language: English

Type (Professor's evaluation): Scientific

No. of pages: 6