|Responsible unit:||Department of Physics and Astronomy|
|Course/CS Responsible:||Master's degree in Nanomaterials Science and Technology|
|Acronym||No. of Students||Study Plan||Curricular Years||Credits UCN||Credits ECTS||Contact hours||Total Time|
|M:CTN||10||Official Study Plan since 2020_M:CTN||2||-||6||42||162|
|M:Q||0||Official study plan||2||-||6||42||162|
|André Miguel Trindade Pereira|
|Paulo Vicente da Silva Marques|
Technological importance of emerging nanotechnologies.
Relation between physical size reduction and modification of physical properties
Physical properties of nanostructures: mechanical, electronic, optical and magne tic.
Applications of nano - materials and devices.
To be able to answer quantitative and qualitat ive questions about cleanrooms, micro and nanofabrication
To be able to plan and execute experiments
To be able to perform literature searches, in cluding critical assessment; development of correct oral and
To be able to develo p well defined mini-projects
To be able to apply correctly maths, science and engineering concepts
To be able to plan and execute experiments and to perform data analys is
To be able to develop teamwork skills
To be able to identify, and solve proble ms in physics and engineering
To be able to identiy processes and/or materials systems to achieve c ertain specifications
To be able to communicate efficiently
Provide advanced training in nanoscience and nanotechnology that allows students to learn and apply key concepts.
The program includes an introduction to the properties at the nanoscale, followed by learning a set of micro/nanofabrication techniques and technologies including deposition or lithography methodologies. With this part are expected to familiarize themselves with the methodologies on micro / nanofabrication. In the final part will be presented various principles of operation of devices, technologies and / or sensors.
The experiments proposed are realized after the first theoretical/pratical sessions and reading some articles and technical documents provided at the beginning of the course, the students are stimulated to seek additional information to address formation deficiencies. Based on this information students should plan the experiment to be performed. At the end they should prepare a short report on one of the experiments and make an oral presentation.
2. Thin film Deposition techniques: PLD, IBD, Sputtering, Thermal Evaporator, CVD, ALD.
3. Micro/nanofabrication: Optical Lithography, E-beam lithography, Focused ion beam lithography, X-ray lithography, Wetetching and dry etching methods
4 Physical Properties I: MEMS, NEMS, Mechanical properties of micro-machined structures, Devices and applications
5 Physical Properties II: Electrical and Optical, Quantum wells/wires/dots, Size and confinement effects.
1. General characteristics and specifications for cleanrooms
2. Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).
3. Microlithography: production of masks for contact lithography and laser direct writing
4. Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).
5. Characterization techniques: optical and profilometry
6. Wire bonding.
7. Fabrication of a functional microdevice
Theoretical-practical classes (TP)
Presentation of the curriculum using multimedia; specialized topics presented in lectures by invited. The basic principle of the classes will be based on a discussion between students and teachers.
The course teaching is based on a problem solving approach. Students, based on knowledge acquired by reading scientific papers and technical documents provided, plan the experiment supported by the teacher. The teachers also support students in the realization of experiment and in its critical analysis. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis.
|Frequência das aulas||40,00|