|Responsible unit:||Department of Physics and Astronomy|
|Course/CS Responsible:||Master's degree in Physics|
|Acronym||No. of Students||Study Plan||Curricular Years||Credits UCN||Credits ECTS||Contact hours||Total Time|
|M:F||2||Plano Oficial do ano letivo 2014||1||-||3||34||81|
|Paulo Vicente da Silva Marques|
To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.
To be able to plan and execute experiments
To be able to perform literature searches, including critical assessment; development of correct oral and written expression.
To be able to develop well defined mini-projects
To be able to apply correctly maths, science and engineering concepts
To be able to plan and execute experiments and to perform data analysis
To be able to develop teamwork skills
To be able to identify, and solve problems in physics and engineering
To be able to identiy processes and/or materials systems to achieve certain specifications
To be able to communicate efficiently
• General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.
• Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).
• Microlithography: production of masks for contact lithography and laser direct writing.
• Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).
• Characterization techniques: optical and profilometry.
• Wire bonding. Cutting and polishing of substrates and devices.
• Fabrication of a functional microdevice
The course teaching is based on a problem solving approach. Students, based on technical knowledge acquired by reading scientific papers and technical documents provided, plan the experiment, being supported by the teacher. The teachers also support the students in the realization of experiment and in the critical analysis of the results. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis.
|Frequência das aulas||34,00|
The assessment consists of five distinct components: Continuous evaluation (10%), individual essay (45%), oral presentation of work and oral questions about micro and nanofabrication techniques (45%)A minimum grade of 7.0/20 in each component valued above 30% is mandatory.