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Micro and Nano Fabrication

Code: F4022     Acronym: F4022     Level: 400

Classification Keyword

Instance: 2021/2022 - 1S Ícone do Moodle

Active? Yes
Responsible unit: Department of Physics and Astronomy
Course/CS Responsible: Master's degree in Physics

Cycles of Study/Courses

Acronym No. of Students Study Plan Curricular Years Credits UCN Credits ECTS Contact hours Total Time
M:F 2 Plano Oficial do ano letivo 2014 1 - 3 34 81

Teaching Staff - Responsibilities

Teacher Responsibility
Paulo Vicente da Silva Marques

Teaching - Hours

Theoretical and practical : 0,50
Laboratory Practice: 2,33
Type Teacher Classes Hour
Theoretical and practical Totals 1 0,50
André Miguel Trindade Pereira 0,50
Laboratory Practice Totals 1 2,33
André Miguel Trindade Pereira 1,174
Paulo Vicente da Silva Marques 1,156

Teaching language




To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.

To be able to plan and execute experiments

To be able to perform literature searches, including critical assessment; development of correct oral and written expression.

To be able to develop well defined mini-projects

Learning outcomes and competences

Main competences

To be able to apply correctly maths, science and engineering concepts

To be able to plan and execute experiments and to perform data analysis

To be able to develop teamwork skills

To be able to identify, and solve problems in physics and engineering

To be able to identiy processes and/or materials systems to achieve certain specifications

To be able to communicate efficiently

Working method



• General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.

• Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).

• Microlithography: production of masks for contact lithography and laser direct writing.

• Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).

• Characterization techniques: optical and profilometry.

• Wire bonding. Cutting and polishing of substrates and devices.

• Fabrication of a functional microdevice

Mandatory literature

Madou Marc J.; Fundamentals of microfabrication. ISBN: 0-8493-0826-7

Teaching methods and learning activities

The course teaching is based on a problem solving approach. Students, based on technical knowledge acquired by reading scientific papers and technical documents provided, plan the experiment, being supported by the teacher. The teachers also support the students in the realization of experiment and in the critical analysis of the results. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis. 

Evaluation Type

Distributed evaluation without final exam

Assessment Components

designation Weight (%)
Participação presencial 10,00
Prova oral 45,00
Trabalho escrito 45,00
Total: 100,00

Amount of time allocated to each course unit

designation Time (hours)
Estudo autónomo 47,00
Frequência das aulas 34,00
Total: 81,00

Eligibility for exams

Compulsory attendance of at least 2/3 of the lectures.

Calculation formula of final grade

The assessment consists of five distinct components: Continuous evaluation (10%), individual essay (45%), oral presentation of work and oral questions about micro and nanofabrication techniques (45%)

A minimum grade of 7.0/20 in each component valued above 30% is mandatory.

Classification improvement

Submission of a new written essay and oral presentation of its contents, that corresponds to 90% of the total grade.



João Ventura

André Pereira

Paulo Marques

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