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Nanotechnologies, Micro and Nanofabrication

Code: FIS4032     Acronym: FIS4032     Level: 400

Classification Keyword

Instance: 2021/2022 - 1S Ícone do Moodle

Active? Yes
Responsible unit: Department of Physics and Astronomy
Course/CS Responsible: Master's degree in Engineering Physics

Cycles of Study/Courses

Acronym No. of Students Study Plan Curricular Years Credits UCN Credits ECTS Contact hours Total Time
M:EF 41 Official Study Plan since 2021_M:EF 1 - 6 40 162

Teaching Staff - Responsibilities

Teacher Responsibility
Paulo Vicente da Silva Marques

Teaching - Hours

Theoretical and practical : 1,71
Laboratory Practice: 1,14
Type Teacher Classes Hour
Theoretical and practical Totals 1 1,714
André Miguel Trindade Pereira 1,714
Laboratory Practice Totals 3 3,429
Paulo Vicente da Silva Marques 1,143

Teaching language

Suitable for English-speaking students


Technological importance of emerging nanotechnologies.

Relation between physical size reduction and modification of physical properties

Physical properties of nanostructures: mechanical, electronic, optical and magne tic.

Applications of nano - materials and devices.

To be able to answer quantitative and qualitat ive questions about cleanrooms, micro and nanofabrication


To be able to plan and execute experiments

To be able to perform literature searches, in cluding critical assessment; development of correct oral and

written expression.

To be able to develo p well defined mini-projects

Main competences

To be able to apply correctly maths, science and engineering concepts

To be able to plan and execute experiments and to perform data analys is

To be able to develop teamwork skills

To be able to identify, and solve proble ms in physics and engineering

To be able to identiy processes and/or materials systems to achieve c ertain specifications

To be able to communicate efficiently

Learning outcomes and competences

Provide advanced training in nanoscience and nanotechnology that allows students to learn and apply key concepts.

The program includes an introduction to the properties at the nanoscale, followed by learning a set of micro/nanofabrication techniques and technologies including deposition or lithography methodologies. With this part are expected to familiarize themselves with the methodologies on micro / nanofabrication. In the final part will be presented various principles of operation of devices, technologies and / or sensors.

The experiments proposed are realized after the first theoretical/pratical sessions and reading some articles and technical documents provided at the beginning of the course, the students are stimulated to seek additional information to address formation deficiencies. Based on this information students should plan the experiment to be performed. At the end they should prepare a short report on one of the experiments and make an oral presentation.

Working method




1. Introduction

2. Thin film Deposition techniques: PLD, IBD, Sputtering, Thermal Evaporator, CVD, ALD.

3. Micro/nanofabrication: Optical Lithography, E-beam lithography, Focused ion beam lithography, X-ray lithography, Wetetching and dry etching methods

4 Physical Properties I: MEMS, NEMS, Mechanical properties of micro-machined structures, Devices and applications

5 Physical Properties II: Electrical and Optical, Quantum wells/wires/dots, Size and confinement effects.


1. General characteristics and specifications for cleanrooms

2. Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).

3. Microlithography: production of masks for contact lithography and laser direct writing

4. Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).

5. Characterization techniques: optical and profilometry

6. Wire bonding.

7. Fabrication of a functional microdevice

Mandatory literature

Lindsay S.M; An Introduction to Nanotechnology, Oxford, 2019
Sami Franssila; Introduction to microfabrication. ISBN: 978-0470-74983-8
Sarangan A; Nanofabrication: Principles to Laboratory Practice, CRC Press, 2016
Hari Singh Nalwa; Nanostructured materials and nanotechnology. ISBN: 0-12-513920-9
Charles P. Poole Jr.; Introduction to nanotechnology. ISBN: 0-471-07935-9
Zheng Cui; Micro-nanofabrication. ISBN: 7-04-017663-7
K, Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov and M. Katayama; Surface Science: An Introduction, Springer, 2003
Bharat, Bhushan; Springer handbook of nanotechnology. ISBN: 3-540-01218-4
C. Dupas; Nanoscience. ISBN: 3-540-28616-0
Marc J. Madou; Fundamentals of microfabrication. ISBN: 0-8493-0826-7
P. Rai-Choudhury; Handbook of microlithography, micromachining, and microfabrication. ISBN: 0-8194-2378-5 Vol. 1

Teaching methods and learning activities

Theoretical-practical classes (TP)

Presentation of the curriculum using multimedia; specialized topics presented in lectures by invited. The basic principle of the classes will be based on a discussion between students and teachers.

Experimental classes:

The course teaching is based on a problem solving approach. Students, based on knowledge acquired by reading scientific papers and technical documents provided, plan the experiment supported by the teacher. The teachers also support students in the realization of experiment and in its critical analysis. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis.


Evaluation Type

Distributed evaluation with final exam

Assessment Components

designation Weight (%)
Exame 50,00
Prova oral 20,00
Trabalho escrito 30,00
Total: 100,00

Amount of time allocated to each course unit

designation Time (hours)
Estudo autónomo 122,00
Frequência das aulas 40,00
Total: 162,00

Eligibility for exams

The students must attend at least 2/3 of the lectures.

Calculation formula of final grade

Final Grade:0,5*Exam+0,3*Essay+0,2* oral presentation(Essay)
It is necessary to achieve a partial grade above 7/20 for the following components: Exam and Essay

Classification improvement

The final grade can be improved through the component "Final exam".


Paulo Marques
André Pereira
João ventura
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